Skip to main content

TXRF products from Rigaku

  • The new, next generation benchtop total reflection X-ray fluorescence (TXRF) spectrometer

  • Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers

  • Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.

  • Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.

  • Trace elemental surface contamination metrology by TXRF; 450mm and 300 mm wafers  

  • Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers

  • Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; for 450/300 mm wafers