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Semiconductor metrology products from Rigaku

  • Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples

  • Process XRR, XRF, and XRD metrology tool for patterned wafers; up to 300 mm wafers 

  • Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers

  • Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.

  • Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.

  • Trace elemental surface contamination metrology by TXRF; 450mm and 300 mm wafers  

  • Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers

  • Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; for 450/300 mm wafers

  • In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers

  • Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers