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Coatings and thin films

From Si on plastic to semiconductor wafer stacks

Every aspect of modern life benefits from coating or thin film technology. Whether a barrier layer film in an integrated circuit chip or a conversion coating on an aluminum beverage can, X-ray analytical techniques are integral to both R&D development, production process control and quality assurance. X-ray fluorescence (XRF) can determine the thickness and elemental composition of metallic coatings. Commonly employed in the semiconductor manufacturing process as a metrology tool, X-ray reflectometry (XRR) is used to measure layer thicknesses in a multi-layer stack of coatings and also can characterize other coating properties like roughness and interlayer diffusion. Emerging as a leading enabler for nano-technology research, X-ray diffraction (XRD) and associated techniques are employed to examine the nature of the molecular structure of films. Rigaku technology and experience provide a variety of non-destructive analytical solutions for coating and thin film measurements.

Coatings

Rigaku recommends the following systems:


  • Benchtop tube below sequential WDXRF spectrometer analyzes O through U in solids, liquids and powders

  • New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification

  • Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software

  • High power, tube above, sequential WDXRF spectrometer with new ZSX Guidance expert system software

  • Low-cost EDXRF elemental analyzer measures Na to U in solids, liquids, powders and thin-films

  • New 60 kV EDXRF system featuring QuantEZ software and optional standardless analysis

  • New variable collimator small spot 60 kV EDXRF system featuring QuantEZ software.

  • EDXRF spectrometer with powerful Windows® software and optional FP.

  • High-performance, Cartesian-geometry EDXRF elemental analyzer measures Na to U in solids, liquids, powders and thin films

  • EDXRF multi-element process analyzer; analyze aluminum (Al) through uranium (U)

  • Scanning multi-element process coatings analyzers for web or coil applications

Application notes

The following application notes are relevant to this industry