Skip to main content

Semiconductor metrology products



TXRF tools

Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.

TXRF 3800e  product image

Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.

TXRF 3760  product image

Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers

TXRF 310Fab  product image

Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers

TXRF-V310  product image


XRF tools

In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers

WaferX 310   product image

Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers

WDA-3650  product image

Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples

AZX 400 wavelength dispersive XRF for large samples


Combo tools

Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers

MFM310   product image


Rigaku is a pioneer and world leader in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With over 25 years of global market leadership in the semiconductor industry, our families of products enable everything from in-fab process control metrology to R&D for thin film and materials characterization. Rigaku specializes in making XRF, XRD and XRR metrology tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. In addition, we offer process TXRF and VPD-TXRF tools for contamination measurement. With global 24/7 service and support, Rigaku delivers cutting edge solutions for yield enhancement and process development.