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Analysis of uniaxially oriented film by wide-range RSM

AppNote B-XRD2025: Analysis of uniaxially oriented film by wide-range RSM

Background

Reciprocal space mapping (RSM) is an XRD technique used to evaluate the lattice spacing and orientation distribution of thin film materials, especially for epitaxial films. The TDI (time delay integration) scan mode of a 2-dimensional X-ray detector can obtain wide-range RSM in a relatively short time. The combination of reciprocal lattice simulation with uniaxial orientation, a new function of SmartLab Studio II, can easily evaluate film orientation.

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